LIMOS - Annuaire

ROUSSY - Agnes

Toutes les publications (14)

Date/Type	Titre/URL/journal	Domaines	Notes SJR/Core	Cit. GScholar

2025 COMM	Dmitrii Fomin, Juan Andres Torres, Anastasiia Doinychko, Valeria Borodin, David Lemoine, Agnès Roussy, Daniele Pagano, Marco-Stefano Scroppo, Gabriele Tochino, Daniele Vinciguerra Modeling Electrical Wafer Sorting results using complete-line Statistical Process Control data Congrès annuel de la SAGIP (Société d'Automatique, de Génie Industriel et de Productique) - 2025	Informatique/Recherche opérationnelle
2024 COMM	Valeria Borodin, Vincent Fischer, Agnès Roussy, Claude Yugma Scheduling semiconductor manufacturing operations in research and development environments ASMC 2024 - 35th Annual SEMI Advanced Semiconductor Manufacturing Conference - 2024	Informatique/Recherche opérationnelle
2022 COMM	Rebecca Clain, Ikram Azzizi, Valeria Borodin, Agnes Roussy On Updating a Virtual Metrology Model in Semiconductor Manufacturing via Transfer Learning 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - 2022	Informatique/Recherche opérationnelle
2022 COMM	Oussama Djedidi, Rebecca Clain, Valeria Borodin, Agnes Roussy Feature Selection for Virtual Metrology Modeling: An application to Chemical Mechanical Polishing 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - 2022
2021 COMM	Rebecca Clain, Valeria Borodin, Michel Juge, Agnes Roussy Virtual metrology for semiconductor manufacturing: Focus on transfer learning 2021 IEEE 17th International Conference on Automation Science and Engineering (CASE) - 2021	Informatique/Recherche opérationnelle
2021 COMM	Taki Eddine Korabi, Valeria Borodin, Michel Juge, Agnes Roussy A hybrid feature selection approach for virtual metrology: Application to CMP process 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2021) - 2021	Sciences de l'ingenieur
2020 ART	Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis A physics-informed Run-to-Run control framework for semiconductor manufacturing Expert Systems with Applications - 2020	Informatique/Apprentissage
2019 ART	Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis A Structure Data-Driven Framework for Virtual Metrology Modeling IEEE Transactions on Automation Science and Engineering - 2019	Physique
2019 COMM	Sophia Bourzgui, Agnès Roussy, Jakey Blue, Gaëlle Georges, Emilie Faivre Signal shape study from process control by interferometry for STI CMP 19TH EUROPEAN ADVANCED PROCESS CONTROL AND MANUFACTURING (APC\|M) CONFERENCE - 2019	Sciences de l'ingenieur
2018 COMM	Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton VIRTUAL METROLOGY MODELING BASED ON GAUSSIAN BAYESIAN NETWORK 2018 Winter Simulation Conference (WSC) - 2018	Physique
2018 COMM	Sophia Bourzgui, Gaelle Georges, Agnès Roussy, Jakey Blue, Emilie Faivre, Jacques Pinaton The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry Reflection, Scattering, and Diffraction from Surfaces VI - 2018	Sciences de l'ingenieur
2018 COMM	Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - 2018	Physique
2017 COMM	Sophia Bourzgui, Agnès Roussy, Jakey Blue, Gaëlle Georges, Emilie Faivre, Karen Labory Device pattern impact on optical endpoint detection by interferometry for STI CMP International Conference on Planarization/CMP Technology - 2017	Sciences de l'ingenieur
2017 COMM	Sophia Bourzgui, Agnès Roussy, Jakey Blue, Gaëlle Georges, Emilie Faivre, Karen Labory, Jacques Pinaton Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements Advanced Semiconductor Manufacturing Conference (ASMC 2017 ) - 2017	Sciences de l'ingenieur